International Conference on Solid State Devices and Materials
Past Programs
日本語
Help
2010 International Conference on Solid State Devices and Materials
Sep 21
- Sep 24, 2010
The University of Tokyo, Tokyo, Japan
Back
Event List
2010 International Conference on Solid State Devices and Materials
Detail
2010 International Conference on Solid State Devices and Materials
Sep 21
- Sep 24, 2010
The University of Tokyo, Tokyo, Japan
[A-4-2]
The dry etching process for patterning P(VDF-TeFE) thin film with various conditions
D. Terashima
1
, J. H. Jeong
1
, C. Kimura
1
, H. Aoki
1
(1.Osaka Univ. , Japan)
https://doi.org/10.7567/SSDM.2010.A-4-2
Download PDF
Back