2011 International Conference on Solid State Devices and Materials
Sep 27 - Sep 30, 2011Aichi Industry & Labor Center (WINC AICHI), Nagoya, Japan
2011 International Conference on Solid State Devices and Materials
Sep 27 - Sep 30, 2011Aichi Industry & Labor Center (WINC AICHI), Nagoya, Japan
[A-2-3]Effects of Plasma-PH3 passivation on Mobility Degradation Mechanisms and Current Conduction Mechanisms of In0.53Ga0.47As N-MOSFET
A. B. S. Sumarlina1,2, H. J. Oh1, A. Du2, S. J. Lee1(1.National Univ. of Singapore, 2.GLOBALFOUNDRIES Singapore Pte.Ltd. , Singapore)
