2011 International Conference on Solid State Devices and Materials
Sep 27 - Sep 30, 2011Aichi Industry & Labor Center (WINC AICHI), Nagoya, Japan
2011 International Conference on Solid State Devices and Materials
Sep 27 - Sep 30, 2011Aichi Industry & Labor Center (WINC AICHI), Nagoya, Japan
[A-5-2]Low Temperature Processed Zinc Oxide Thin Film Transistors by Plasma Assisted Atomic Layer Deposition
Y. Kawamura1, M. Tani1, N. Hattori2, N. Miyatake2, M. Horita1, Y. Ishikawa1, Y. Uraoka1,3(1.NAIST, 2.Mitsui Eng. and Shipbuilding Co., Ltd., 3.CREST-JST , Japan)
