International Conference on Solid State Devices and Materials
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2011 International Conference on Solid State Devices and Materials
Sep 27
- Sep 30, 2011
Aichi Industry & Labor Center (WINC AICHI), Nagoya, Japan
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2011 International Conference on Solid State Devices and Materials
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2011 International Conference on Solid State Devices and Materials
Sep 27
- Sep 30, 2011
Aichi Industry & Labor Center (WINC AICHI), Nagoya, Japan
[AL-6-2]
Thermodynamic Control of Interface Layer Formation in High-k Gate Stacks on 4H-SiC
S. Nakatsubo
1
, T. Nishimura
1
, K. Kita
1
, K. Nagashio
1
, A. Toriumi
1
(1.Univ. of Tokyo , Japan)
https://doi.org/10.7567/SSDM.2011.AL-6-2
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