2012 International Conference on Solid State Devices and Materials
Sep 25 - Sep 27, 2012Kyoto International Conference Center, Kyoto, Japan
2012 International Conference on Solid State Devices and Materials
Sep 25 - Sep 27, 2012Kyoto International Conference Center, Kyoto, Japan
[A-2-2]Low-loss Si waveguides with Variable-Shaped-Beam EB Lithography for Large-scaled Photonic Circuits
N. Hirayama1,2, H. Takahashi1,3, Y. Noguchi1,2, M. Yamagishi1,2, T. Horikawa1,2(1.Inst. for Photonics-Electronics Convergence System Tech., 2.National Inst.of Advanced Industrial Science and Tech., 3.Photonics Electronics Tech. Res. Association , Japan)
