2012 International Conference on Solid State Devices and Materials
Sep 25 - Sep 27, 2012Kyoto International Conference Center, Kyoto, Japan
2012 International Conference on Solid State Devices and Materials
Sep 25 - Sep 27, 2012Kyoto International Conference Center, Kyoto, Japan
[A-2-6]Fabrication of Er silicate crystalline waveguide by directed self-assembly approach using radical assisted sputtering
T. Nakajima1, T. Shinagawa1, T. Kimura1, H. Isshiki1, T. Sugawara2, Y. Jiang2(1.Univ. of Electro-Communications, 2.Shincron Co. Ltd. , Japan)
