International Conference on Solid State Devices and Materials
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2012 International Conference on Solid State Devices and Materials
Sep 25
- Sep 27, 2012
Kyoto International Conference Center, Kyoto, Japan
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2012 International Conference on Solid State Devices and Materials
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2012 International Conference on Solid State Devices and Materials
Sep 25
- Sep 27, 2012
Kyoto International Conference Center, Kyoto, Japan
[A-7-5]
Ge Selective Growth in Micron and Submicron Trenches with UHV-CVD
Y. Mizuno
1
, Y. Ishikawa
1
, K. Wada
1
(1.Univ. of Tokyo , Japan)
https://doi.org/10.7567/SSDM.2012.A-7-5
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