2013 International Conference on Solid State Devices and Materials
Sep 24 - Sep 27, 2013Hilton Fukuoka Sea Hawk, Fukuoka, Japan
2013 International Conference on Solid State Devices and Materials
Sep 24 - Sep 27, 2013Hilton Fukuoka Sea Hawk, Fukuoka, Japan
[A-2-5]Fluorine ion implantation optimization in Saddle-Fin array devices for sub-40-nm DRAM technology
K.L. Chiang1,2, W.P. Lee1,2, C.C. Lee1, C.S. Sung1, C.K. Wei1,2, C.M. Yang1,2, J.C. Wang2, P. Kao1, C.Y. Lee2, H.H. Chen1, C.Y. Hsiao1, C.S. Lai2(1.Chang Gung Univ., 2.Inotera Memories Inc. (Taiwan))
