International Conference on Solid State Devices and Materials
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2013 International Conference on Solid State Devices and Materials
Sep 24
- Sep 27, 2013
Hilton Fukuoka Sea Hawk, Fukuoka, Japan
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2013 International Conference on Solid State Devices and Materials
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2013 International Conference on Solid State Devices and Materials
Sep 24
- Sep 27, 2013
Hilton Fukuoka Sea Hawk, Fukuoka, Japan
[B-1-4]
Impact of Additional Pt on Channel Stress Induced by NiSi Film Formation
M. Mizuo
1
, T. Yamaguchi
2
, S. Kudo
2
, Y. Hirose
1,2
, H. Kimura
2
, J. Tsuchimoto
2
, N. Hattori
2
(1.Renesas Semiconductor Engineering Corp., 2.Renesas Electronics Corp. (Japan))
https://doi.org/10.7567/SSDM.2013.B-1-4
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