2013 International Conference on Solid State Devices and Materials
Sep 24 - Sep 27, 2013Hilton Fukuoka Sea Hawk, Fukuoka, Japan
2013 International Conference on Solid State Devices and Materials
Sep 24 - Sep 27, 2013Hilton Fukuoka Sea Hawk, Fukuoka, Japan
[B-2-1]Low-temperature Microwave Annealing Process for Ge MOSFETs
Y.J. Lee1,6, S.S. Chuang2, C.I. Liu3, F.K. Hsueh1, P.J. Sung1, C.T Wu1, C.H. Lai4, Y.M. Wan3, M.I. Current5, T.Y. Tseng2(1.National Nano Device Lab., 2.National Chiao Tung Univ., 3.I-Shou Univ., 4.Chung Hua Univ., 5.Current Scientific, 6.National Chung Hsing Univ. (Taiwan))
