2013 International Conference on Solid State Devices and Materials

2013 International Conference on Solid State Devices and Materials

Sep 24 - Sep 27, 2013Hilton Fukuoka Sea Hawk, Fukuoka, Japan
International Conference on Solid State Devices and Materials
2013 International Conference on Solid State Devices and Materials

2013 International Conference on Solid State Devices and Materials

Sep 24 - Sep 27, 2013Hilton Fukuoka Sea Hawk, Fukuoka, Japan

[B-2-2]Low NiGe Contact Resistances by Carrier Activation Enhancement (CAE) Techniques for Ge CMOSFETs

H. Miyoshi1, T. Ueno1, Y. Hirota1, J. Yamanaka2, K. Arimoto2, K. Nakagawa2, T. Kaitsuka1(1.Tokyo Electron Ltd., 2.Univ. of Yamanashi (Japan))
https://doi.org/10.7567/SSDM.2013.B-2-2