International Conference on Solid State Devices and Materials
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2013 International Conference on Solid State Devices and Materials
Sep 24
- Sep 27, 2013
Hilton Fukuoka Sea Hawk, Fukuoka, Japan
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2013 International Conference on Solid State Devices and Materials
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2013 International Conference on Solid State Devices and Materials
Sep 24
- Sep 27, 2013
Hilton Fukuoka Sea Hawk, Fukuoka, Japan
[B-2-2]
Low NiGe Contact Resistances by Carrier Activation Enhancement (CAE) Techniques for Ge CMOSFETs
H. Miyoshi
1
, T. Ueno
1
, Y. Hirota
1
, J. Yamanaka
2
, K. Arimoto
2
, K. Nakagawa
2
, T. Kaitsuka
1
(1.Tokyo Electron Ltd., 2.Univ. of Yamanashi (Japan))
https://doi.org/10.7567/SSDM.2013.B-2-2
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