2014 International Conference on Solid State Devices and Materials
Sep 8 - Sep 11, 2014Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan
2014 International Conference on Solid State Devices and Materials
Sep 8 - Sep 11, 2014Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan
[A-6-4]Study about the Process Damage Mechanism of the Patterned Interface Perpendicular Magnetic Tunnel Juncotions (MTJs) by Hydrogen Ion Treatments
J.H. Jeong1,3, T. Endoh1,2(1.Tohoku Univ., 2.Center for Innovative Integrated Electronic Systems (CIES), 3.SAMSUNG Electronics Co., Ltd. (Japan))
