2014 International Conference on Solid State Devices and Materials
Sep 8 - Sep 11, 2014Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan
2014 International Conference on Solid State Devices and Materials
Sep 8 - Sep 11, 2014Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan
[B-1-2]Impact of Post-Growth Annealing for Thin-Film Ge Photodiodes on Si
S. Nagatomo1, Y. Kawamata1, Y. Izawa2, S. Hoshino3, Y. Ishikawa1(1.Univ. of Tokyo, 2.Tokyo Electron Miyagi Ltd., 3.Tokyo Electron Ltd. (Japan))
