2015 International Conference on Solid State Devices and Materials

2015 International Conference on Solid State Devices and Materials

Sep 27 - Sep 30, 2015Sapporo Convention Center, Sapporo, Japan
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International Conference on Solid State Devices and Materials
2015 International Conference on Solid State Devices and Materials

2015 International Conference on Solid State Devices and Materials

Sep 27 - Sep 30, 2015Sapporo Convention Center, Sapporo, Japan

[A-3-2]High-Performance MOS Capacitor Type Si Optical Modulator, and Surface Illumination-type Ge Photodetector for Optical Interconnection

○J. Fujikata1, S. Takahashi1, M. Takahashi2, M. Noguchi1, M. Miura1, T. Nakamura1, Y. Arakawa3(1.PETRA, 2.AIST, 3.Univ. of Tokyo(Japan))
https://doi.org/10.7567/SSDM.2015.A-3-2
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