International Conference on Solid State Devices and Materials

2015 International Conference on Solid State Devices and Materials

Sep 27 - Sep 30, 2015Sapporo Convention Center, Sapporo, Japan

International Conference on Solid State Devices and Materials

2015 International Conference on Solid State Devices and Materials

Sep 27 - Sep 30, 2015Sapporo Convention Center, Sapporo, Japan

[A-5-2]Suspended Ge Cross-shaped Microstructures for Enhancing Biaxial Tensile Strain

^○S. Ishida¹, S. Kako¹, K. Oda², T. Ido², S. Iwamoto¹, Y. Arakawa¹(1.Univ. of Tokyo, 2.Hitachi Ltd.(Japan))

https://doi.org/10.7567/SSDM.2015.A-5-2