International Conference on Solid State Devices and Materials

2015 International Conference on Solid State Devices and Materials

Sep 27 - Sep 30, 2015Sapporo Convention Center, Sapporo, Japan

International Conference on Solid State Devices and Materials

2015 International Conference on Solid State Devices and Materials

Sep 27 - Sep 30, 2015Sapporo Convention Center, Sapporo, Japan

[A-5-3]Crystallinity Improvement of Ge Waveguides Fabricated by Epitaxial Lateral Overgrowth and Chemical Mechanical Polishing

^○K. Oda¹, T. Okumura¹, J. Kasai¹, S. Kako², S. Iwamoto², Y. Arakawa²(1.Hitachi Ltd., 2.Univ. of Tokyo(Japan))

https://doi.org/10.7567/SSDM.2015.A-5-3