2019 International Conference on Solid State Devices and Materials

2019 International Conference on Solid State Devices and Materials

Sep 2 - Sep 5, 2019Nagoya University
International Conference on Solid State Devices and Materials
2019 International Conference on Solid State Devices and Materials

2019 International Conference on Solid State Devices and Materials

Sep 2 - Sep 5, 2019Nagoya University

[B-2-03]Double heterojunction Si-Ge-Si pin waveguide photodiodes for high-speed communications at 1550nm wavelength

L. Virot1, D. Benedikovic2, G. Aubin2, J.-M. Hartmann1, B. Szelag1, F. Amar2, X. Le Roux2, C. Alonso-Ramos2, P. Crozat2, D. Marris-Morini2, E. Cassan2, C. Baudot3, F. Boeuf3, J.M. Fédéli1, C. Kopp1, L. Vivien2(1.Univ. Grenoble Alpes and CEA, LETI (France), 2.Centre de Nanosciences et de Nanotechnologies, CNRS, Univ. Paris-Sud, Univ. Paris-Saclay (France), 3.STMicroelectronics, Silicon Technology Development (France))
https://doi.org/10.7567/SSDM.2019.B-2-03