2019 International Conference on Solid State Devices and Materials
Sep 2 - Sep 5, 2019Nagoya University
[B-3-03]Silicon Photonics Co-integrated with Silicon Nitride for Optical Phased Arrays
○A. Marinins1, S.P. Dwivedi1, J. Ø. Kjellman1, S. Kerman, T. David1, B. Figeys1, R. Jansen1, D.S. Tezcan1, X. Rottenberg1, P. Soussan1(1.imec (Belgium))