International Conference on Solid State Devices and Materials

2021 International Conference on Solid State Devices and Materials

Sep 6 - Sep 9, 2021

International Conference on Solid State Devices and Materials

2021 International Conference on Solid State Devices and Materials

Sep 6 - Sep 9, 2021

[A-1-06]Effect of Percolation Path on Temperature Dependence of Threshold Voltage Variability in Bulk MOSFETs

〇TOMOKO MIZUTANI¹, KIYOSHI TAKEUCHI¹, TAKUYA SARAYA¹, HIROSHI OKA², TAKAHIRO MORI², MASAHARU KOBAYASHI^1,3, TOSHIRO HIRAMOTO¹(1.IIS, Univ. of Tokyo, 2.AIST, 3.d.lab, Univ. of Tokyo)

https://doi.org/10.7567/SSDM.2021.A-1-06