International Conference on Solid State Devices and Materials
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2021 International Conference on Solid State Devices and Materials
Sep 6
- Sep 9, 2021
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2021 International Conference on Solid State Devices and Materials
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2021 International Conference on Solid State Devices and Materials
Sep 6
- Sep 9, 2021
[A-4-01 (Invited)]
Technology Enablement for Advanced Logic Nodes using Materials to Systems Co-Optimization
TM
Platform
〇Ashish Pal
1
, El Mehdi Bazizi
1
(1.Applied Materials)
https://doi.org/10.7567/SSDM.2021.A-4-01
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