2021 International Conference on Solid State Devices and Materials

2021 International Conference on Solid State Devices and Materials

Sep 6 - Sep 9, 2021
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International Conference on Solid State Devices and Materials
2021 International Conference on Solid State Devices and Materials

2021 International Conference on Solid State Devices and Materials

Sep 6 - Sep 9, 2021

[A-4-02] Introduction of high tensile strain in Ge-on-Insulator structures by oxidation/annealing at high temperature

〇Xueyang Han1, ChiaTsong Chen1, Cheol-Min Lim1, Kasidit Toprasertpong1, Mitsuru Takenaka1, Shinichi Takagi1(1.Univ. of Tokyo)
https://doi.org/10.7567/SSDM.2021.A-4-02
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