2021 International Conference on Solid State Devices and Materials
Sep 6 - Sep 9, 2021
2021 International Conference on Solid State Devices and Materials
Sep 6 - Sep 9, 2021
[A-4-03]Anisotropic Strain States in Extremely-Thin Body Ge-on-Insulator p-type MOSFET Observed by Oil-Immersion Raman Spectroscopy
〇Ryo Yokogawa1,2, Chia-Tsong Chen3, Kasidit Toprasertpong3, Mitsuru Takenaka3, Shinichi Takagi3, Atsushi Ogura1,2(1.Meiji Univ., 2.MREL, 3.Univ. of Tokyo)
