2021 International Conference on Solid State Devices and Materials

2021 International Conference on Solid State Devices and Materials

Sep 6 - Sep 9, 2021
International Conference on Solid State Devices and Materials
2021 International Conference on Solid State Devices and Materials

2021 International Conference on Solid State Devices and Materials

Sep 6 - Sep 9, 2021

[A-4-06]Electron Mobility Enhancement in n-GeSn Epitaxial Layers by Tensile Strain

〇Kai-Ying Tien1, Chia-You Liu1, Po-Yuan Chiu1, Yen Chuang1, Hsiang-Shun Kao1, Jiun-Yun Li1,2,3(1.Graduate Inst. of Electronics Eng., National Taiwan Univ., 2.Department of Electrical Eng., National Taiwan Univ., 3.Taiwan Semiconductor Res. Inst.)
https://doi.org/10.7567/SSDM.2021.A-4-06