2021 International Conference on Solid State Devices and Materials
Sep 6 - Sep 9, 2021
2021 International Conference on Solid State Devices and Materials
Sep 6 - Sep 9, 2021
[A-5-02]Control of HfO2 Crystallizing Phase in UV Nanosecond Pulsed Laser Annealing
〇Toshiyuki Tabata1, Pablo Acosta Alba2, Jérôme Richy2, Marianne Coig2, Pierre-Edouard Raynal1, Fabien Rozé1, Sebastien Kerdilès2(1.Laser Systems & Solutions of Europe (LASSE), 2.Univ. Grenoble Alpes, CEA-LETI)
