2021 International Conference on Solid State Devices and Materials

2021 International Conference on Solid State Devices and Materials

Sep 6 - Sep 9, 2021
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International Conference on Solid State Devices and Materials
2021 International Conference on Solid State Devices and Materials

2021 International Conference on Solid State Devices and Materials

Sep 6 - Sep 9, 2021

[A-5-03]Antiferroelectric properties of ALD ZrO2 ultra-thin films: correlation with the crystalline structure

〇Xuan Luo1, Kasidit Toprasertpong1, Mitsuru Takenaka1, Shinichi Takagi1(1.Univ. of Tokyo)
https://doi.org/10.7567/SSDM.2021.A-5-03
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