2021 International Conference on Solid State Devices and Materials
Sep 6 - Sep 9, 2021
2021 International Conference on Solid State Devices and Materials
Sep 6 - Sep 9, 2021
[A-6-02] Potential benefits of S/D HDD activation by melt laser annealing in 3D-integrated top-tier FDSOI FETs
Anne Vandooren1, 〇Toshiyuki Tabata2, Pierre Eyben1, Erik Roseel1, Andriy Hikavyy1, Karim Huet2, Fulvio Mazzamuto2, Eugenio Dentoni Litta1, Naoto Horiguchi1(1.imec, 2.Laser Systems & Solutions of Europe (LASSE))
