2021 International Conference on Solid State Devices and Materials
Sep 6 - Sep 9, 2021
2021 International Conference on Solid State Devices and Materials
Sep 6 - Sep 9, 2021
[A-6-03]Impact of the buried oxide thickness in UV laser heated 3D stacks
Pierre Morin1, 〇Toshiyuki Tabata2, Fabien Rozé 2, Mohamed Saib 1, Hilde Thielens 1, Louis Thuries 2, Karim Huet2, Fulvio Mazzamuto 2(1.imec, 2.Laser Systems & Solutions of Europe (LASSE))
