[A-6-08] TCAD Simulation for Capture / Emission of Carriers by Traps in SiN: Trap-Assisted Tunneling Model Extended for Capture of Carriers Injected via Fowler-Nordheim Tunneling
〇Michiru Hogyoku1, Yoshinori Yokota1, Kazuhito Nishitani1(1.KIOXIA Corp.)
