2021 International Conference on Solid State Devices and Materials

2021 International Conference on Solid State Devices and Materials

Sep 6 - Sep 9, 2021
International Conference on Solid State Devices and Materials
2021 International Conference on Solid State Devices and Materials

2021 International Conference on Solid State Devices and Materials

Sep 6 - Sep 9, 2021

[A-6-08] TCAD Simulation for Capture / Emission of Carriers by Traps in SiN: Trap-Assisted Tunneling Model Extended for Capture of Carriers Injected via Fowler-Nordheim Tunneling

〇Michiru Hogyoku1, Yoshinori Yokota1, Kazuhito Nishitani1(1.KIOXIA Corp.)
https://doi.org/10.7567/SSDM.2021.A-6-08