2021 International Conference on Solid State Devices and Materials
Sep 6 - Sep 9, 2021
2021 International Conference on Solid State Devices and Materials
Sep 6 - Sep 9, 2021
[A-6-10]Contactless Characterization of SiOx/c-Si by FTIR and μ-PCD applied to pMOS Devices
〇Mickael Lozach1, Sommawan Khumpuang1,2, Shiro Hara1,2(1.Minimal Fab Promoting Organization, 2.National Institute of Advanced Industrial Science and Technology (AIST))
