2021 International Conference on Solid State Devices and Materials

2021 International Conference on Solid State Devices and Materials

Sep 6 - Sep 9, 2021
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International Conference on Solid State Devices and Materials
2021 International Conference on Solid State Devices and Materials

2021 International Conference on Solid State Devices and Materials

Sep 6 - Sep 9, 2021

[A-7-01 (Invited)] Enablement of Next Generation Nanosheet Technology

〇Nicolas Loubet1, Curtis Durfee 1, Julien Frougier1, Shogo Mochizuki1, Maruf Bhuiyan 1, Ruqiang Bao 1, Andrew Greene1, Eric Miller1, Indira Seshadri1(1.IBM Research)
https://doi.org/10.7567/SSDM.2021.A-7-01
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