2021 International Conference on Solid State Devices and Materials
Sep 6 - Sep 9, 2021
2021 International Conference on Solid State Devices and Materials
Sep 6 - Sep 9, 2021
[A-7-02]High Density & High Drive Current Elongated SGT Transistor for Logic Circuit Having Process Compatibility with 1.5nm node SGT SRAM
〇Kenichi Kanazawa1, Yisuo Li3, Tetsuo Izawa1, Koji Sakui1, Georg Strof2, Oskar Baumgartner2, Gerhard Rzepa2, Markus Karner2, Zlatan Stanojevic2, Nozomu Harada1(1.Semicon Consulting Ltd., 2.Global TCAD Solutions Ltd., 3.Unisantis Electronics Singapore Pre Ltd.)
