2021 International Conference on Solid State Devices and Materials

2021 International Conference on Solid State Devices and Materials

Sep 6 - Sep 9, 2021
International Conference on Solid State Devices and Materials
2021 International Conference on Solid State Devices and Materials

2021 International Conference on Solid State Devices and Materials

Sep 6 - Sep 9, 2021

[A-7-04]Width Dependence of Drain Current Variability Components in Extremely Narrow GAA Silicon Nanowire MOSFETs down to 2nm Width

〇Zihao Liu1, Tomoko Mizutani1, Takuya Saraya1, Masaharu Kobayashi1, Toshiro Hiramoto1(1.Inst. of Indus. Sci., The Univ. of Tokyo)
https://doi.org/10.7567/SSDM.2021.A-7-04