2022 International Conference on Solid State Devices and Materials

2022 International Conference on Solid State Devices and Materials

Sep 26 - Dec 23, 2022Makuhari Messe
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International Conference on Solid State Devices and Materials
2022 International Conference on Solid State Devices and Materials

2022 International Conference on Solid State Devices and Materials

Sep 26 - Dec 23, 2022Makuhari Messe

[A-9-05]Observation of Reversible Refractive Index Change of CMOS-Compatible Silicon Nitride Film

〇Yuriko Maegami1, Gangwei Cong1, Morifumi Ohno1, Toshihiro Narushima1, Noritsugu Yamamoto1, Hitoshi Kawashima1, Koji Yamada1(1. AIST (Japan))
https://doi.org/10.7567/SSDM.2022.A-9-05
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Presentation style: On-site (in-person)
We report a reversible refractive index change of a silicon nitride film deposited by plasma-enhanced chemical vapor deposition. The reversible change was observed in alternately processing of annealing and ultraviolet irradiation. The reversible index change has a potential to be applicable to non-volatile photon-ic interference circuits.
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