2022 International Conference on Solid State Devices and Materials

2022 International Conference on Solid State Devices and Materials

Sep 26 - Dec 23, 2022Makuhari Messe
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International Conference on Solid State Devices and Materials
2022 International Conference on Solid State Devices and Materials

2022 International Conference on Solid State Devices and Materials

Sep 26 - Dec 23, 2022Makuhari Messe

[B-3-03]Impact of N-type Impurities on Solid-phase Crystallization of Amorphous Ge

〇Koki Nozawa1, Takeshi Nishida1, Takashi Suemasu1, Kaoru Toko1(1. Univ. of Tsukuba (Japan))
https://doi.org/10.7567/SSDM.2022.B-3-03
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Presentation style: Online
Among n-type impurities, P doping in amorphous Ge significantly promoted the lateral growth during solid-phase crystallization, resulting in large grains. The electron mobility was the highest among n-type polycrystalline Ge directly grown on insulators at low temperatures.
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