[A-1] Advanced CMOS: Process Technology

3:45 PM - 4:00 PM JST(6:45 AM - 7:00 AM UTC)

[A-1-05] Transferring Compressive or Tensile Stress from Stressors to Si Layers: A Novel Approach

〇Pablo Acosta Alba¹, Mayara Auricchio¹, Patrice Gergaud¹, Jean-Michel Hartmann¹, Shay Reboh¹ (1. Univ. Grenoble ALpes, CEA-LETI (France))

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