[A-1] Advanced CMOS: Process Technology

3:45 PM - 4:00 PM JST(6:45 AM - 7:00 AM UTC)

[A-1-05] Transferring Compressive or Tensile Stress from Stressors to Si Layers: A Novel Approach

〇Pablo Acosta Alba¹, Mayara Auricchio¹, Patrice Gergaud¹, Jean-Michel Hartmann¹, Shay Reboh¹ (1. Univ. Grenoble ALpes, CEA-LETI (France))

DOI:

https://doi.org/10.7567/SSDM.2024.A-1-05

Password required to view