Presentation Information
[A-6-03]Accurate Evaluation of Effective Mobility in Si nMOSFETs at Cryogenic Temperature by Introducing Quasi-Static C-V Method
〇Yutong Chen1, Zhao Jin1, Xueyang Han1, Hiroshi Oka2, Takahiro Mori2, Kasidit Toprasertpong1, Mitsuru Takenaka1, Shinichi Takagi1 (1. The Univ. of Tokyo (Japan), 2. National Inst. of Advanced Indus. Sci. and Tech. (Japan))