Presentation Information
[A-7-02]Comparative Analysis of Middle Dielectric Isolation (MDI) Integration Approaches in Monolithic Complementary Field Effect Transistors: ‘MDI-First vs MDI-Last’
〇Camila Toledo de Carvalho Cavalcante1, Steven Demuynck1, Alfonso Sepulveda Marquez1, Maria Chistiakova1, Subhobroto Choudhury1, Geert Mannaert1, Farid Sebaai1, Maryam Hosseini1, Anne Vandooren1, Pallavi Puttarame Gowda1, Emmanuel Dupuy1, BT Chan1, Hans Mertens1, Jef Geypen1, Sujith Subramanian1, Lucas Petersen Barbosa Lima1, Serge Biesemans1, Naoto Horiguchi1 (1. imec, Leuven, Belgium (Belgium))