Presentation Information
[B-1-03]New insight of ferroelectric Hf0.5Zr0.5O2 properties under cryogenic
temperatures in integrated ferroelectric capacitors
〇Flavien Berthaud1, Liam Hosier1, Niccolo Castellani1, Jean Rottner1, Valentina Méli1, Laurent Grenouillet1, Julie Laguerre1, Catherine Carabasse1, Jean Coignus1, Mikaël Cassé1, Simon Martin1 (1. Univ. Grenoble Alpes, CEA, Leti F-38000 Grenoble (France))