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New insight of ferroelectric Hf0.5Zr0.5O2 properties under cryogenic<br />temperatures in integrated ferroelectric capacitors

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Ferroelectric Memory Materials

2024 International Conference on Solid State Devices and Materials

Presentation Information

[B-1-03]New insight of ferroelectric Hf0.5Zr0.5O2 properties under cryogenic
temperatures in integrated ferroelectric capacitors

DOI:

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Presentation Information

[B-1-03]New insight of ferroelectric Hf0.5Zr0.5O2 properties under cryogenictemperatures in integrated ferroelectric capacitors

DOI:

Password required to view

[B-1-03]New insight of ferroelectric Hf0.5Zr0.5O2 properties under cryogenic
temperatures in integrated ferroelectric capacitors