[B-3-02]Unipolar Polarization Switching and High-endurance Operation of HZO/Si Anti-ferroelectric FETs
〇Shin-Yi Min1, Kasidit Toprasertpong1, Mitsuru Takenaka1, Shinichi Takagi1(1. The Univ. of Tokyo (Japan))
We investigate the anti-ferroelectric-like (AFE) behavior of Hf1-xZrxO2 (HZO)/Si FETs and its potential for high-endurance performance. The counterclockwise hysteresis in Id-Vg characteristics under unipolar bias operation is successfully demonstrated through half-loop polarization in AFeFET. The non-volatile program/erase operation can be realized under unipolar operation owing to built-in bias. Based on this finding, we demonstrate high-endurance AFeFET using unipolar bias operation.
