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BEOL Compatible High-reliability La-doped ZrO<sub>2 </sub>Antiferroelectric Capacitor

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Ferroelectric Devices

2024 International Conference on Solid State Devices and Materials

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[B-3-04 (Late News)]BEOL Compatible High-reliability La-doped ZrO₂Antiferroelectric Capacitor

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Presentation Information

[B-3-04 (Late News)]BEOL Compatible High-reliability La-doped ZrO2 Antiferroelectric Capacitor

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[B-3-04 (Late News)]BEOL Compatible High-reliability La-doped ZrO₂Antiferroelectric Capacitor