[B-3] Ferroelectric Devices

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[B-3-04 (Late News)] BEOL Compatible High-reliability La-doped ZrO₂ Antiferroelectric Capacitor

〇Jianguo Li¹, Junliang Zhou², Fan Wu², ChoongHyun Lee¹, Yi Zhao^1,2 (1. Zhejiang University (China), 2. East China Normal University (China))

DOI:

https://doi.org/10.7567/SSDM.2024.B-3-04

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