Presentation Information
[B-6-01 (Invited)]Metal Induced Lateral Crystallization (MILC) Techniques for Highly Scalable Vertical Si Channel in 3D Flash Memory
〇Noritaka Ishihara1, Yusuke Shimada1, Takamitsu Ochi1, Satoshi Seto1, Haruki Matsuo1, Hiroki Yamashita1, Sho Morita1, Masafumi Ukishima1, Yusuke Arayashiki1, Suzuka Kajiwara1, Katsuya Nishiyama1, Akiyuki Murayama1, Kikuko Sugimae1, Shinji Mori1, Yuta Saito1, Takeshi Shundo1, Aki Maeda1, Hiroyuki Kamiya2, Yasuhiro Uchiyama1, Makoto Fujiwara1, Fumiki Aiso1, Katsuyuki Sekine1, Norio Ohtani1 (1. Kioxia Corporation (Japan), 2. Western Digital Corporation (Japan))