[C-4] Advanced integration

10:45 AM - 11:15 AM JST(1:45 AM - 2:15 AM UTC)Invited

[C-4-01 (Invited)] Backside Power Delivery Process Integration Challenges

〇Liesbeth Witters¹、Peng Zhao¹、Gerald Beyer¹、Eric Beyne¹ (1. imec (Belgium))

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