[C-5] Advanced Metallization II

9:15 AM - 9:30 AM JST(12:15 AM - 12:30 AM UTC)

[C-5-02] From design to manufacturing: new methods to fix the mechanical problems associated with device production

〇Lionel VIGNOUD¹, Benjamin VAVRILLE³, Laurent Luc CHAPELON³, Rafael ESTEVEZ² (1. Univ. Grenoble Alpes, CEA, Leti (France), 2. Univ. Grenoble Alpes, Laboratoire SIMaP (France), 3. STMicroelectronics (France))

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