[C-6] MEMS and Advanced Metallization II

10:45 AM - 11:15 AM JST(1:45 AM - 2:15 AM UTC)Invited

[C-6-01 (Invited)] MEMS Activities at AIST: Ultrathin Piezoelectric MEMS

〇Yusuke Takei¹ (1. Natl. Inst. of Adv. Indus. Sci. and Tech. (AIST) (Japan))

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