2024 International Conference on Solid State Devices and Materials
Sep 1 - Sep 4, 2024Arcrea HIMEJI
2024 International Conference on Solid State Devices and Materials
Sep 1 - Sep 4, 2024Arcrea HIMEJI
[E-4-04]Fabrication and Demonstration of Optical Waveguides and Beam Splitters Using Aluminum Oxide with Low Loss at Visible Wavelength
〇Takuto Yamaguchi1, Naoki Fushimi1, Manabu Ohtomo1, Tetsuya Miyatake1, Shoichi Miyahara1, Hirokazu Hosoi1, Toshiyuki Miyazawa1, Kenichi Kawaguchi1, Ryoichi Ishihara2, Shintaro Sato1(1. Fujitsu Ltd. (Japan), 2. QuTech, TU Delft (Netherlands))
Alumina is a promising low-loss material in the visible light range. We design and fabricate alumina waveguides for optical circuit applications to optically control diamond spin qubits. A low propagation loss of 2.61 dB/cm is achieved with an improved fabrication process. We also successfully fabricate beam splitters and demonstrate control over light splitting ratios, which can be applied to future photonic circuits.