Presentation Information
[H-4-01 (Invited)]MX2 Layer Transfer: A path towards integrating epitaxial 2D materials in a 300mm pilot line
〇Souvik Ghosh1, Quentin Smets1, Tom Schram1, Marie-Emmanuelle Boulon1, Damien J Leech1, Henry Medina Silva1, Anastasiia Kruv1, Benjamin Groven1, Rudy Verheyen1, Bavo Storms1, Pawan Kumar1, Pierre Morin1, Inge Asselberghs1, Cesar J Lockhart de la Rosa1, Steven Brems1, Gouri Sankar Kar1 (1. imec (Belgium))