2024 International Conference on Solid State Devices and Materials
Sep 1 - Sep 4, 2024Arcrea HIMEJI
2024 International Conference on Solid State Devices and Materials
Sep 1 - Sep 4, 2024Arcrea HIMEJI
[H-4-01 (Invited)]MX2 Layer Transfer: A path towards integrating epitaxial 2D materials in a 300mm pilot line
〇Souvik Ghosh1, Quentin Smets1, Tom Schram1, Marie-Emmanuelle Boulon1, Damien J Leech1, Henry Medina Silva1, Anastasiia Kruv1, Benjamin Groven1, Rudy Verheyen1, Bavo Storms1, Pawan Kumar1, Pierre Morin1, Inge Asselberghs1, Cesar J Lockhart de la Rosa1, Steven Brems1, Gouri Sankar Kar1(1. imec (Belgium))
CMOS exploration and integration at 2nm nodes and beyond could benefit from the development of a layer transfer module, enabling transfer of epitaxially grown 2D materials. We present IMEC’s recent efforts to enable complete automation of this module by starting with epitaxially grown 2D materials, transferring them onto integrable Si substrates and finally demonstrating high yield CMOS structures via conventional semiconductor processing techniques.