The 38th International Conference of Photopolymer Science and Technology

The 38th International Conference of Photopolymer Science and Technology

2021年6月15日〜7月14日オンライン開催
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The 38th International Conference of Photopolymer Science and Technology
The 38th International Conference of Photopolymer Science and Technology

The 38th International Conference of Photopolymer Science and Technology

2021年6月15日〜7月14日オンライン開催

[A-34][Invited] Randomness of Polymer Microstructure in the Resist Film as Shot Noise

Makoto Muramatsu (1), Satoru Shimura (2), Arisa Hara (2)((1) Advanced Technology Development Department, Tokyo Electron Kyushu, (2) Process Technology Department, Tokyo Electron Kyushu)
30min.
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