The 38th International Conference of Photopolymer Science and Technology
2021年6月15日〜7月14日オンライン開催
The 38th International Conference of Photopolymer Science and Technology
2021年6月15日〜7月14日オンライン開催
[A-37][Invited] New Approaches to EUV Photoresists: Expanding the Polymer Toolbox
Jingyuan Deng (1), Florian Kaefer (2), Sean Bailey (2), Yusuke Otsubo (2,3), 〇Christopher K. Ober (2)((1) Department of Chemistry and Chemical Biology, Cornell University, (2) Department of Materials Science & Engineering, Cornell University, (3) JSR)
30min.