The 38th International Conference of Photopolymer Science and Technology

The 38th International Conference of Photopolymer Science and Technology

2021年6月15日〜7月14日オンライン開催
戻る
The 38th International Conference of Photopolymer Science and Technology
The 38th International Conference of Photopolymer Science and Technology

The 38th International Conference of Photopolymer Science and Technology

2021年6月15日〜7月14日オンライン開催

[A-42][Invited] Study on Irradiation Effects by Femtosecond-pulsed Extreme Ultraviolet in Resist Materials

Hiroki Yamamoto, Yuji Hosaka, Masahiko Ishino, Thanh-Hung Dinh, Masaharu Nishikino, Yasunari Maekawa(National Institutes for Quantum and Radiological Science and Technology (QST))
30min.
戻る