The 38th International Conference of Photopolymer Science and Technology

The 38th International Conference of Photopolymer Science and Technology

2021年6月15日〜7月14日オンライン開催
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The 38th International Conference of Photopolymer Science and Technology
The 38th International Conference of Photopolymer Science and Technology

The 38th International Conference of Photopolymer Science and Technology

2021年6月15日〜7月14日オンライン開催

[A-44]Evolution of Secondary Electrons Emission During EUV Exposure in Photoresists

Roberto Fallica (1), Stefano Nannarone (2), Nicola Mahne (2), Andrea Marco Malvezzi (2), Danilo De Simone (1)((1) IMEC, (2) CNR-IOM synchrotron beamline BEAR (Elettra synchrotron))
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